A micromachined surface stress sensor with electronic readout
نویسندگان
چکیده
منابع مشابه
A micromachined surface stress sensor with electronic readout.
A micromachined surface stress sensor has been fabricated and integrated off chip with a low-noise, differential capacitance, electronic readout circuit. The differential capacitance signal is modulated with a high frequency carrier signal, and the output signal is synchronously demodulated and filtered resulting in a dc output voltage proportional to the change in differential surface stress. ...
متن کاملSurface Micromachined Thermal Shear Stress Sensor
We have designed, fabricated, and tested a new type of thermal shear-stress sensor. The sensor consists of a 2 m wide polysilicon thermistor (with a range of lengths, 80-200 m) on a 1.2 m thick silicon-nitride diaphragm, which is on top of a vacuum cavity 200 200 2 m in size. The vacuum cavity provides a good thermal isolation between the resistive element and the substrate; shear-stress sensit...
متن کاملA Surface Micromachined CMOS MEMS Humidity Sensor
This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a bulk micromachined humidity sensor, the machining precision and the sizes of the surface micromach...
متن کاملA surface micromachined microtactile sensor array
This paper discusses the design and testing of an eight-by-eight tactile capacitive array sensor for detection of sub-millimeter features and objects, where the entire sensor array is smaller than normal human spatial resolution of 1mm. Each square tactel is less than 100μm on a side, with similar spacing between elements. The structural material was doped polysilicon with an air gap dielectric...
متن کاملA Surface-micromachined Shear Stress Imager
A new MEMS shear stress sensor imager has been developed and its capability of imaging surface shear stress distribution has been demonstrated. The imager consists of multi-rows of vacuum-insulated shear stress sensors with a 300 μm pitch. This small spacing allows it to detect surface flow patterns that could not be directly measured before. The high frequency response (30 kHz) of the sensor u...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2008
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.2830938